Energy Dispersive Spectroscopy
Chemical analysis in the E-SEM is performed using energy dispersive spectroscopy (EDS). EDS measures the energy and intensity distribution of X-ray signals generated by the electron beam striking the surface of the specimen. The elemental composition at a point, along a line, or in a defined area can be easily determined to a high degree of precision (~0.1 wt.%).
In the failure analysis of electronic products, EDS can be crucial in determining solder composition, examining plating quality, determining the location and source of contamination, and performing reverse engineering.